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Module 13

SPGU Control and Applications

13-19

Start

Calculates Vbase

Sets meas. parameters

to I_sub sampling test

I_sub sampling meas.

by applying Vg pulse

Records Isub and Vbase

More Vbase?

Calculates IcpMax & NSS

Plots Icp vs Vbase

Looping of classic test for each

base step of Gate pulse.

Charge Pumping

Icp is measured after each increment of the gate pulse base value. A curve of Icp vs base value is

plotted. The maximum Icp value is noted. At this point:

Icp = f * Qss

= f * Ag * q * Dit

where

f: pulse frequency

Qss: recombined charge per pulse period

Aq: channel area of the transistor

q: electron charge

Dit: interface state density

1 2 ... 100 101 102 103 104 105 106 107 108 109 110 ... 123 124

Agilent B1500A 1
Semiconductor Device 1
Analyzer 1
Manual Part Number 2
Warranty 2
Technology Licenses 2
Restricted Rights Legend 2
In This Manual 4
Class Exercises 6
Demo.xpg file 7
.xtd files 7
.xtr files 7
1 ohm Resistor 10
1.1 kohm Resistor 10
511 kohm Resistor 10
0.1 uF Capacitor 10
Module 1. Introduction 13
Module 2. Getting Started 13
Module 5. Basic Measurement 15
Contents 20
Contents-8 20
In This Module 22
What is Test Definition 23
What is Test Contents 24
Define New Test… 25
Set test information 26
Define device parameters 26
Set properties 26
Define test parameters 27
Setup example 28
Primary Entry Field 29
Result example 30
To Define Test Contents 31
Available elements 32
Available variables 33
Local Variables Definition 34
Editing test contents 35
•Inspect 36
Test Definition Example 38
To Define Test Output 40
Define Analysis Parameters… 41
Display Parameters 42
• To Call Execution Files 44
• Prober Control Script 44
Module 11 45
To Call Execution Files 48
To set Format field 49
{I[,A][:F]} 49
• To Use Built-in Functions 50
• To Use Read Out Functions 50
Specify ProberType 52
CustomProber 52
To Use Subsite move 53
Prober Control Script 54
Start_xxxx.exe 55
Prober_info.ini 56
Iterator_xxxx.exe 57
Final_xxxx.exe 58
Subsite_xxxx.exe 59
To Change Execution Flow 60
12 Miscellaneous Operations 61
Function Status Indicators 63
Run Option 64
Module 12 65
Miscellaneous Operations 65
Calibration 66
Configuration 72
SMU/PG Selector 78
Highlight this line 80
Click this button 80
To Enable System Controller 81
To Start Desktop EasyEXPERT 82
High Voltage SPGU 89
Mode: VPULSE or ALWG 95
SPGU Pulse Setup 96
SPGU Control 96
Buttons on 96
Measurement Setup 96
Pulse Generator Mode 100
Pulse period 101
2. SPGU Pulse Setup window 101
3. Pulse setup parameters 101
Pulse output example: 101
Charge Pumping 103
Class Exercise 106
Jumper Leads – MOS transistor 107
Measurement Result Example 108
Flash Memory 109
Flash Memory – Endurance Test 110
NOR Write Connection 112
Substrate 112
NOR Erase Connection 113
Measure Vth Connection 114
Module 13 117
SPGU Control and Applications 117
ALWG Mode 119
Jumper Leads – Capacitance 123

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Agilent Technologies B2201A Manuale di Servizio Pagina 105

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