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Module 6

Low Current Measurement

6-3

z Measurements below 10 fA at the wafer level

z Repeatability within a few fA

z Speeds less than 1 minute for subthreshold sweep

Low Current Measurement

What is possible?

Making wafer level measurements to fA levels is easy and routine using proper measurement

procedures on a low noise probe station. This module explains how.

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Agilent B1500A 1
Semiconductor Device 1
Analyzer 1
Manual Part Number 2
Warranty 2
Technology Licenses 2
Restricted Rights Legend 2
In This Manual 4
Class Exercises 6
.xtr files 7
Demo.xpg file 7
.xtd files 7
1 ohm Resistor 10
1.1 kohm Resistor 10
511 kohm Resistor 10
0.1 uF Capacitor 10
Module 1. Introduction 13
Module 2. Getting Started 13
Module 5. Basic Measurement 15
Contents 20
Contents-8 20
5 Basic Measurement 21
In This Module 22
SMU Block Diagram 23
Basic Sweep Measurement 24
Sweep Measurement Modes 25
Combining VAR1, VAR1’, VAR2 25
Why Four SMUs? 26
Class Exercise 27
SMU Triax Connection 28
Wrong Triaxial Hookup 29
Jumper Leads – MOS transistor 30
To Import Demo Data 31
To Get Setup Data 32
Classic Test – Channel Setup 33
Do not abort on 34
Classic Test – Display Setup 35
To Start Measurement 36
Data Display Window – Graph 37
Data Display Window - List 38
Paste to Notepad 39
To Copy List Data 39
Application Test 40
Module 5 41
Basic Measurement 41
SMUs May Be Connected 42
200 V Resistor Sweep 43
200 V BVceo 43
Two SMUs in Series 44
Voltage across resistor 44
VR = V1-V2 44
VAR1' Ratio = -1 45
Measurement and Display Pages 45
Graphics Page 0 to 200 V 46
200 mA Output 47
Two SMUs in Parallel 48
Current in resistor 48
Itotal = I1+I2 48
VAR1' Ratio = 1 49
Resistor 50
Graphics Page 0 to 200 mA 50
Cabling and Fixturing Issues 51
Simplified Diagram 52
Kelvin Triaxial Cable 56
Why Kelvin Measurements? 57
Cable Connections 59
Class Example - Jumper Leads 60
2. Click Recall button 61
To Get REKELV Test Setup: 61
Single Kelvin Measurement 62
Non-Kelvin Measurement 63
To Kelvin Probe 64
To Guarded Chuck 64
Connector Plate 65
Guarded to within 2mm of tip 67
Single Triax Kelvin Triax 67
Triaxial Probes 67
Simplifying RF Connections 68
Interlock Connection 69
16493J-001 1.5 m cable 70
16493J-002 3.0 m cable 70
16442A/B Fixture 70
16058A Fixture Compatibility 71
6 Low Current Measurement 73
Low Current Measurement 75
What is possible? 75
Challenges 76
Clean Probing Environment 77
What is Required? 77
Where to Start? 78
Low Current 79
Calibration & Zero Cancel 79
Calibration 80
Measurements Near Zero fA 81
ZERO CHECK - No cable 82
Using Default SMU Setup 82
Delete SMU1 and SMU2 83
Change Mode to V and 83
Function to VAR1 83
ZERO CHECK 83
Channel Setup 83
Do not change this screen 84
Display Setup 86
Bumping cable 88
Bending Cable 88
Effect of cable movement 88
Appendix: Using ASU 89
Configuration 90
HRSMU+ASU 91
Low Current Subthreshold 92
SD214DE MOS Subthreshold 94
Trade Off Speed vs Accuracy 95
What is measured? 96
Low Current Gummel Plot 97
Module 6 98
Small step size 99
Negative sweep values 99
Range and Integration Time 100
Maximum resolution 100
Gummel Plot 100
LOW CURRENT MEASUREMENT 101
Gummel Plot With 102
ULTRA LOW CURRENT 103
Subthreshold Curve 103
Small STEP: 100 mV 104
Large HOLD TIME: 3 sec 104
Measurement Setup 104
Set long integration time 106
Leakage to fA levels 107
Chuck must be guarded 107
Fowler-Nordheim (FN) Plot 108
Negative sweep 109
Accumulation mode 109
Wait for 5 V initial step 109
FOWLER-NORDHEIM PLOT 109
Measurement Page 109
Low Current Gate Oxide Meas 110
Using Guarded Chuck 110

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Agilent Technologies B1500A Manuale di Servizio Pagina 75

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