
Agilent B1500A User’s Guide, Edition 13 4- 19
Specifications
Hardware
SMU Supplemental Characteristics
• Current compliance setting accuracy (for opposite polarity)
For HPSMU, MPSMU, HRSMU
± (setting accuracy + 12 % of range), for 1 pA to 10 nA ranges
± (setting accuracy + 2.5 % of range), for 100 nA to 1 A ranges
For MCSMU
± (setting accuracy + 2.5 % of range)
• SMU pulse setting accuracy (fixed measurement range)
For HPSMU, MPSMU, HRSMU
Width: ± (0.5 % + 50 s)
Period: ± (0.5 % + 100 s)
For MCSMU
Width: ± (0.1 % + 2 s)
Period: ± (0.1 % + 100 s)
• Minimum pulse measurement time
For HPSMU, MPSMU, HRSMU: 16 s
For MCSMU: 2 s
• Voltage source output resistance (Force line, Non-Kelvin connection)
0.2 (HPSMU)
0.3 (MPSMU, HRSMU)
• Voltage measurement input resistance
For HPSMU, MPSMU, HRSMU: 10
13
For MCSMU: 10
9
• Current source output resistance
For HPSMU, MPSMU, HRSMU: 10
13
For MCSMU: 10
9
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