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8-32 Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1

Application Library

QSCV Maximum Measurement Value and Accuracy

Figure 8-12 Calculation Example of Measurement Accuracy: MP/HRSMU, ASU+SMU

Conditions:

QSCV Operating Mode: Normal

Measurement Range: 1 nA

Output Range: 20 V

Integration Time: 2, 1, 0.5, 0.3 s corresponding to the lines from top to bottom

Equivalent Parallel Resistance of DUT: 10 G

Guard Capacitance of Measurement Path: 200 pF

0.001 0.01 0.1 1 10

QSCV Measurement Voltage (V)

Reading Accuracy (%)

1.E-14

1.E-13

1.E-12

1.E-11

1.E-10

0.001 0.01 0.1 1 10

QSCV Measurement Voltage (V)

Offset Accuracy (F)

1 2 ... 103 104 105 106 107 108 109 110 111 112 113 ... 227 228

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Agilent Technologies EasyEXPERT Guida Utente Pagina 108