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Agilent EasyEXPERT User’s Guide Vol. 2, Edition 1 8-49

Application Library

QSCV Maximum Measurement Value and Accuracy

Figure 8-29 Calculation Example of Measurement Accuracy: MP/HRSMU, ASU+SMU

Conditions:

QSCV Operating Mode: 4155C/4156C compatible

Measurement Range: 100 nA

Output Range: 20 V

Integration Time: 2, 1, 0.5, 0.3 s corresponding to the lines from top to bottom

Equivalent Parallel Resistance of DUT: 10 T

Guard Capacitance of Measurement Path: 200 pF

0.001 0.01 0.1 1 10

QSCV Measurement Voltage (V)

Reading Accuracy (%)

1.E-12

1.E-11

1.E-10

1.E-09

1.E-08

1.E-07

1.E-06

0.001 0.01 0.1 1 10

QSCV Measurement Voltage (V)

Offset Accuracy (F)

1 2 ... 120 121 122 123 124 125 126 127 128 129 130 ... 227 228

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