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Module 8

Capacitance Measurement

8-7

16442A/B Fixture

B1500A Rear View

SMU4

SMU3

SMU2

SMU1

CMU

GNDU

Cable Connections

The following cables are required to perform this class exercise.

CMU cable (Agilent N1300A-001/002), 1 ea.

Triax cable (Agilent 16494A-001/002), 2 ea.

One side of the CMU cable forms the attachment used to join and fix it to the CMU. And the other

side provides four BNC connectors used to connect the fixture as shown.

Connect the cables between the B1500A and the test fixture as follows.

SMU1 : SMU1

SMU2 : SMU2

Hcur : PGU1 (red)

Hpot : PGU2 (orange)

Lcur : VSU1 (black)

Lpot : VSU2 (gray)

1 2 ... 72 73 74 75 76 77 78 79 80 81 82 ... 135 136

Agilent B1500A 1
Semiconductor Device 1
Analyzer 1
Manual Part Number 2
Warranty 2
Technology Licenses 2
Restricted Rights Legend 2
In This Manual 4
Class Exercises 6
Demo.xpg file 7
.xtd files 7
.xtr files 7
1 ohm Resistor 10
1.1 kohm Resistor 10
511 kohm Resistor 10
0.1 uF Capacitor 10
Module 1. Introduction 13
Module 2. Getting Started 13
Module 5. Basic Measurement 15
Contents 20
Contents-8 20
7 Measurement Functions 21
In This Module 22
SMU Pulsed Sweep Measurement 23
SMU Pulse Mode 24
VAR1 Sweep 24
Pulse On Primary Source 25
Hints on Pulsing the HPSMU 26
Limitations 27
SMU Triax Connection 29
Jumper Leads – MOS transistor 30
Data Display Window 31
Drain pulse 32
Enter new name before save 32
Channel Setup 32
Measurement Setup 33
I/V-t Sampling Measurement 34
Sampling Measurement 36
Module 7 37
Measurement Functions 37
RC Measurement 38
10 data/decade 39
Variable for time data 40
Sampling Exercise 40
High speed ADC 41
FIXED range 41
Bias starts at 0 s 42
Negative Hold Time 42
Interval < 2 ms 44
Current source 44
Channel and Measurement Setup 44
Auto Analysis 45
Vth Example 46
Vth Measurement 47
Damaged MOS FET Device? 49
Function Setup 51
Display Setup Page 52
Analysis Setup Page 53
SMU Filter 54
SMU Filter: ON (add filter) 55
SMU Series Resistor 56
0.5 M ohm (device only) 59
Series R: 1MOHM (add 1 M ohm) 60
Calculated value 62
Compensation 62
Standby Function 63
To Use Standby Function 64
Bias Hold After Measurement 65
Bias Hold Function 66
Bias Hold Exercise 68
Repeat Measurement Setup 69
LED lights on 70
LED lights off 70
8 Capacitance Measurement 71
B1500A Multi Frequency CMU 73
CMU Block Diagram 74
C-V Sweep Source 75
C-V Sweep Measurement 76
Cable Connections 77
Conductance 79
Capacitance Measurement 79
Measurement Example 79
CMU Calibration 81
Calibration 82
Opens dialog box to start 82
SCUU – for IV/CV Switching 83
Module 8 84
GSWU Connection Example 87
ASU – for IV/CV Switching 88
Configuration 90
ASU Switch Control 90
Modification Overview 93
To Modify Test Definition 100
Test Definition editor 100
Variable Yes is used in 101
Class Exercise 104
To Use Debug Tools 105
Break point 105
ReturnPort = SMU1 105
ReturnCh = OUT1 105
Variable Inspector 105
Debug: Inspect button 107
Paused point 107
Module 9 109
To Use Built-in Functions 110
To Use Read Out Functions 112
Vth = @L1X 113
To Add Data Display 114
To Use Auto Analysis Function 116
Data Display: OFF/ON 117
Data Store: OFF/ON 117
Assign to external variables… 118
Setup example 119
Result example 120
Using built-in functions 121
To use Auto Analysis twice 124
Auto Analysis Setup 128
Check this box 128
To Set Display Setup 129
Display Setup 129
Idrain=Id@Vth*Polarity 130
To Use Auto Analysis Twice 131
Setting vector data 135

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Agilent Technologies 16440A Manuale di Servizio Pagina 77

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