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Module 8
Capacitance Measurement
8-8
1
2
3 4
5
6
7
8
9
10
11
12
13
14 15
16
17
18
20
19
21
22
23
24
25
27
26
28
14
15
28
1
F
G
3
F
G
4
F
G
5
F
G
6
F
G
2
F
G
1
SMU
2
1
VMU
2
1
VSU
F
S
GNDU
F
2
F
1
PGU
1: Substrate
2: Source
3: Gate
4: Drain
G
S
D
Sub
CMUL
CMUH
Jumper Leads – MOS transistor
For all class exercises, you need the 28-pin dual in line socket which comes standard with the 4145
fixture (16058A) or the newer fixture (16442A/B). Either fixture works fine.
With the 16442A/B fixture, note that there are two SMU numbering schemes....3 SMUs with force
and sense, or six SMUs with force only. For this class example we will use the six (6) SMU scheme.
On older fixtures, this scheme is shown in light blue lettering. In newer fixtures, this scheme is
shown in white reverse background lettering.
This class exercise requires six jumper leads to connect the DUT. Connect the jumper leads between
the following terminals.
SMU1 : terminal 2
SMU2 : terminal 4
PGU1 : terminal 1
PGU2 : terminal 1
VSU1 : terminal 3
VSU2 : terminal 3
- Agilent B1500A 1
- Semiconductor Device 1
- Analyzer 1
- Manual Part Number 2
- Warranty 2
- Technology Licenses 2
- Restricted Rights Legend 2
- In This Manual 4
- Class Exercises 6
- Demo.xpg file 7
- .xtd files 7
- .xtr files 7
- 1 ohm Resistor 10
- 1.1 kohm Resistor 10
- 511 kohm Resistor 10
- 0.1 uF Capacitor 10
- Module 1. Introduction 13
- Module 2. Getting Started 13
- Module 5. Basic Measurement 15
- Contents 20
- Contents-8 20
- 7 Measurement Functions 21
- In This Module 22
- SMU Pulsed Sweep Measurement 23
- SMU Pulse Mode 24
- VAR1 Sweep 24
- Pulse On Primary Source 25
- Hints on Pulsing the HPSMU 26
- Limitations 27
- SMU Triax Connection 29
- Jumper Leads – MOS transistor 30
- Data Display Window 31
- Drain pulse 32
- Enter new name before save 32
- Channel Setup 32
- Measurement Setup 33
- I/V-t Sampling Measurement 34
- Sampling Measurement 36
- Module 7 37
- Measurement Functions 37
- RC Measurement 38
- 10 data/decade 39
- Variable for time data 40
- Sampling Exercise 40
- High speed ADC 41
- FIXED range 41
- Bias starts at 0 s 42
- Negative Hold Time 42
- Interval < 2 ms 44
- Current source 44
- Channel and Measurement Setup 44
- Auto Analysis 45
- Vth Example 46
- Vth Measurement 47
- Damaged MOS FET Device? 49
- Function Setup 51
- Display Setup Page 52
- Analysis Setup Page 53
- SMU Filter 54
- SMU Filter: ON (add filter) 55
- SMU Series Resistor 56
- 0.5 M ohm (device only) 59
- Series R: 1MOHM (add 1 M ohm) 60
- Calculated value 62
- Compensation 62
- Standby Function 63
- To Use Standby Function 64
- Bias Hold After Measurement 65
- Bias Hold Function 66
- Bias Hold Exercise 68
- Repeat Measurement Setup 69
- LED lights on 70
- LED lights off 70
- 8 Capacitance Measurement 71
- B1500A Multi Frequency CMU 73
- CMU Block Diagram 74
- C-V Sweep Source 75
- C-V Sweep Measurement 76
- Cable Connections 77
- Conductance 79
- Capacitance Measurement 79
- Measurement Example 79
- CMU Calibration 81
- Calibration 82
- Opens dialog box to start 82
- SCUU – for IV/CV Switching 83
- Module 8 84
- GSWU Connection Example 87
- ASU – for IV/CV Switching 88
- Configuration 90
- ASU Switch Control 90
- Modification Overview 93
- To Modify Test Definition 100
- Test Definition editor 100
- Variable Yes is used in 101
- Class Exercise 104
- To Use Debug Tools 105
- Break point 105
- ReturnPort = SMU1 105
- ReturnCh = OUT1 105
- Variable Inspector 105
- Debug: Inspect button 107
- Paused point 107
- Module 9 109
- To Use Built-in Functions 110
- To Use Read Out Functions 112
- Vth = @L1X 113
- To Add Data Display 114
- To Use Auto Analysis Function 116
- Data Display: OFF/ON 117
- Data Store: OFF/ON 117
- Assign to external variables… 118
- Setup example 119
- Result example 120
- Using built-in functions 121
- To use Auto Analysis twice 124
- Auto Analysis Setup 128
- Check this box 128
- To Set Display Setup 129
- Display Setup 129
- Idrain=Id@Vth*Polarity 130
- To Use Auto Analysis Twice 131
- Setting vector data 135
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